| 1. | Calcium fluoride structure
氟化钙型结构 |
| 2. | Standard test method for determination of calcium fluoride in fluorspar by complexometric titration
用络合滴定法测定氟石中氟化钙含量的标准试验方法 |
| 3. | Methods for chemical analysis of fluor - spar - the edta volumetric method for the determination of calcium fluoride content
氟石化学分析方法edta容量法测定氟化钙量 |
| 4. | Methods for chemical analysis of melted welding fluxes . the pyrolytic method for determination of calcium fluoride content
熔炼焊剂化学分析方法.热解法测定氟化钙量 |
| 5. | Methods for chemical analysis of melted welding fluxes . the lead chlorofluoride - edta volumetric method for determination of calcium fluoride content
熔炼焊剂化学分析方法.氟氯化铅- edta容量法测定氟化钙量 |
| 6. | The gravity analysis is carried out especially for the synthetic fused silica and calcium fluoride used in 193nm lithographic objective as well as the optical elements with structural sizes of ( 200mm ~ ( 300mm . large numbers of analysis data for surface shape error are obtained by using algor finite element analysis software . then these data are plotted into curves and comparison analysis will be carried out , finally the measures and schemes for reducing gravity deformation are proposed
因此，本论文重点对大口径光学系统在高精度光学镜头装校中，因重力变形进行了详细的分析研究，特别针对193nm光刻物镜系统所使用的材料sytheticfusedsilica和caleiumfluoride以及用到的结构尺寸200mm ~ 300mm光学零件进行了重力变形分析，使用algor有限元分析软件获得了大量的面形误差分析数据，然后将这些数据绘成曲线进行对比分析，最后提出了减小重力变形的措施与方案，并进行了实验，验证了分析结果是正确的，减小重力变形的方法是有效的。 |
